Oblique patterned etching of vertical silicon sidewalls
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چکیده
منابع مشابه
Maskless etching of silicon using patterned microdischarges
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2016
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.4945681